FIELD: testing engineering. SUBSTANCE: for checking the process of development of photoresist layer on optical disc-original transparent body is brought in contact with developing liquid. Light beam gets on optical disc-original from light source, and diffracted beam passes to detector through developing liquid and transparent body. Diffracted beam is formed of incident light beam by means of reflection. It is essentially diffracted beam of first order. Incident light beam is modulated. Development of photoresist layer is checked by checking the variations of light diffracted beam revealed by detector. EFFECT: higher efficiency. 20 cl, 9 dwg
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Authors
Dates
1998-03-27—Published
1994-04-05—Filed