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2 133 521

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(51)

IPC

(21) (22)

Application

98102544/25, 1998-02-16

(22)

Actual filing date

1998-02-16

(45)

Published

1999-07-20

(72)

Inventor

Aleksandrova A.T.Vasin V.A.Gorjunov A.A.Ermakov E.S.

(73)

Holder

Aleksandrova Ariadna TimofeevnaVasin Vladimir Anatol'EvichGorjunov Anatolij AndreevichErmakov Evgenij Semenovich

DEVICE FOR LOCKING Russian patent published in 1999 - IPC

Abstract RU 2133521 C1

FIELD: sealing of vacuum spaces during locking of semiconductor articles in process of their treatment. SUBSTANCE: device for locking has loading, locking and technological chambers installed in sequence and fitted with fixtures for transportation of articles. Chambers intercommunicate through holes shut off by high-vacuum seals. Seals and fixtures for transportation of articles are manufactured from heat-resistant materials. Feeding table is mounted near each seal for movement from one chamber to another one through hole shut off by high-vacuum seal. EFFECT: increased quality of processing of semiconductor articles thanks to their preliminary degassing by heating in vacuum space with preservation of high vacuum at all stages of treatment. 1 cl, 1 dwg

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RU 2 133 521 C1

Authors

Aleksandrova A.T.

Vasin V.A.

Gorjunov A.A.

Ermakov E.S.

Dates

1999-07-20—Published

1998-02-16—Filed