DEVICE FOR DEPOSITION OF SURFACE LAYERS ON ARTICLES BY METHOD OF TREATMENT WITH GAS-DISCHARGE PLASMA Russian patent published in 1998 - IPC

FIELD: ion plasma technologies of formation of protective, optical, decorative and other layers on the surface of articles made of metals, glass and ceramics; may be used in manufacture of solar-radiation absorbing devices, medical, industrial and household appliances and devices. SUBSTANCE: device has vacuum chamber; sources of working and reaction gases; circular plates installed in chamber coaxially to one another and electrically insulated; source of deposited by spraying material in the form of cylindrical target installed between plates and coaxially to them; thermal-emission cathode comprised of several modules secured over circumference to plates; annular anode installed between plates; article holder made of two electrically insulated rings, each ring secured to one of circular plates coaxially to them. Located over circumference of rings are units for fixing of articles to be treated. Device allows deposition by spraying of single or multielement coatings from material of target and its compounds, deposition by spraying assisted by ion and electron bombardment, spraying of article surface with activation of surface by sprayed atoms of target. In the course of operation, articles are rotated round their axes by special mechanism to attain uniform treatment of articles. EFFECT: extended functional potentialities of device; provision of conditions for realization by one device of different types of ion-plasma treatment; efficient use of coating material; higher economic efficiency of device; possibility of treatment of large number of long-size articles whose length equals approximately the length occupied by plasma zone. 10 cl, 2 dwg