FIELD: metal processing.
SUBSTANCE: invention relates to application of coatings on articles and can be used for vacuum-plasma treatment of articles, including equipment, tools and parts in machine building, woodworking, heat engineering, instrument making and other fields. Ion source chamber of device is formed by two coaxial cylinders, bounded at one side by circular wall section of vacuum chamber, on other side - by a circular plate attached through insulators to coaxial cylinders, said plate acting as anode of ion source and having at least one annular slotted hole aligned with cylindrical chamber walls of ion source. Target is located outside ion source chamber and is fixed parallel to anode coaxially with annular hole. Holder of processed article has a cylindrical shape and is installed inside smaller cylinder of ion source chamber along axis of ion source. At end of holder of processed articles is mounted a unit for fixing processed articles, located at level of anode and parallel thereto.
EFFECT: technical result is broader functional capabilities of device due to creation of conditions for application of multicomponent (single-phase or multiphase) and/or multilayer coatings, as well as transition layers on processed article.
4 cl, 3 dwg
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Authors
Dates
2016-10-10—Published
2015-05-27—Filed