FIELD: physics.
SUBSTANCE: invention is a structure consisting of a base and an ordered array of microstructures in form of protrusions on said base, arranged such that in each row, each n-th element is replaced with empty space, and in each next row the replaced element is shifted by one position; the number n can vary from 3 to 10 depending on the size of the microstructures. Presence of elements replaced with empty space creates slanting strips in the array of microstructures which are used when calibrating the test structure and the object table.
EFFECT: use of such a test structure enables to calibrate object tables with high accuracy, determine the average value of the given displacement of the table and uncertainty of the displacement.
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