FIELD: physics.
SUBSTANCE: test object for calibrating microscopes is in form of groove structures whose walls have an inclined profile, a flat base and a different width on the surface and at the bottom. A constant angle between the side wall and the bottom plane is maintained for all elements. Linear dimensions of at least part of the elements differ from each other by a certain number of times, and linear dimensions of the largest element can be measured with high accuracy on calibrated measuring equipment used when taking measurements.
EFFECT: independence of measurements from ambient temperature and high accuracy of measuring length of sections which characterise the profile of a relief feature in a large wavelength range.
3 cl, 1 dwg
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