FIELD: microelectronics and informatics; magnetic and optomagnetic storage media. SUBSTANCE: thin (0.1 mcm) magnetic films are produced by implanting ions of magnetic elements onto substrate made of polyethylene terephthalate. Iron ions are implanted in substrate at dose rate of 1016-1017 ion/sq. cm and ion flux density of 6×1012-1014 ion/sq.cm. EFFECT: improved magnetic characteristics of film due to reduced number of radiation faults and reduced implanting time; reduced cost of process.
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Authors
Dates
1999-03-20—Published
1997-01-29—Filed