METHOD FOR PRODUCING THIN MAGNETIC FILMS Russian patent published in 1999 - IPC

Abstract RU 2127929 C1

FIELD: microelectronics and informatics; magnetic and optomagnetic storage media. SUBSTANCE: thin (0.1 mcm) magnetic films are produced by implanting ions of magnetic elements onto substrate made of polyethylene terephthalate. Iron ions are implanted in substrate at dose rate of 1016-1017 ion/sq. cm and ion flux density of 6×1012-1014 ion/sq.cm. EFFECT: improved magnetic characteristics of film due to reduced number of radiation faults and reduced implanting time; reduced cost of process.

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RU 2 127 929 C1

Authors

Petukhov V.Ju.

Ibragimova M.I.

Khajbullin I.B.

Dates

1999-03-20Published

1997-01-29Filed