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2 566 371

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(51)

IPC

G02B5/18(2006-01-01)

C23C14/48(2006-01-01)

(21) (22)

Application

2014131708/28, 2014-07-30

(24)

Start date

2014-07-30

(22)

Actual filing date

2014-07-30

(45)

Published

2015-10-27

(72)

Inventor

Stepanov Andrej L'VovichNuzhdin Vladimir IvanovichValeev Valerij FerdinandovichGaljautdinov Mansur FaljakhutdinovichOsin Jurij Nikolaevich

(73)

Holder

Federal'Noe Gosudarstvennoe Bjudzhetnoe Uchrezhdenie Nauki Kazanskij Fiziko-Tekhnicheskij Institut Im. E.K. Zavojskogo Kazanskogo Nauchnogo Tsentra Rossijskoj Akademii Nauk Kaznts Ran)

METHOD OF MAKING POLYMER-BASED DIFFRACTION GRATING Russian patent published in 2015 - IPC G02B5/18 C23C14/48

Abstract RU 2566371 C1

FIELD: chemistry.

SUBSTANCE: method includes forming a given periodic diffraction microstructure on a polymer substrate by implanting metal ions with energy of 4-1200 keV, with a radiation dose which provides concentration of implanted metal atoms of 2.5·10²⁰ - 6.5·10²² atoms/cm³ in the irradiated substrate. As the substrate a light-insensitive polymer with ion beam current density of 1.5·10¹² - 3.5·10¹³ ions/cm²·s through a surface mask is used.

EFFECT: making diffraction gratings for the visible range based on light-insensitive types of polymers with nanoparticles of different metals.

10 dwg

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RU 2 566 371 C1

Authors

Stepanov Andrej L'Vovich

Nuzhdin Vladimir Ivanovich

Valeev Valerij Ferdinandovich

Galjautdinov Mansur Faljakhutdinovich

Osin Jurij Nikolaevich

Dates

2015-10-27—Published

2014-07-30—Filed