FIELD: measuring equipment.
SUBSTANCE: invention relates to scanning electron microscopy. Invention uses the principle of photogrammetric processing of images obtained in a scanning electron microscope at various inclination angles the test sample. On the surface of the test sample, spherical structural elements generating a contrast in the image are preliminarily formed, the results of photogrammetric image processing are corrected for the values of the individual height of the structural elements determined from the images.
EFFECT: technical result is increased three-dimensional reconstruction accuracy.
1 cl, 2 dwg
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