Show metadata Hide metadata

(19)

(11)

2 139 593

(13)

(51)

IPC

(21) (22)

Application

97100906/28, 1997-01-21

(24)

Start date

1997-01-21

(22)

Actual filing date

1997-01-21

(45)

Published

1999-10-10

(72)

Inventor

Khakhanina T.I.Kljueva T.B.Selivanova I.N.Savel'Ev V.A.Krasnikov G.Ja.Kovalev A.A.

(73)

Holder

Khakhanina Tat'Jana Ivanovna

METHOD FOR CONTINUOUS CHEMICAL LIQUID CLEANING OF POLYMER-COVERED SURFACES OF PARTS, PRIMARILY SEMICONDUCTOR PLATES Russian patent published in 1999 - IPC

Abstract RU 2139593 C1

FIELD: electronic engineering. SUBSTANCE: method involves electrochemical treatment of sulfuric acid aqueous solution, treatment of plate surfaces with activated solution obtained, repeated electrochemical treatment, and cleaning of solution. Sulfur acid concentration is 5.5 to 6.5 V; plates are treated at temperature of 80 to 100 C. In this way, photoresist is easily removed from plates. Spent solutions are reconditioned for their reuse in continuous process; composition of etching solution is maintained stable. EFFECT: improved efficiency of process. 8 dwg, 5 tbl

Similar patents RU2139593C1

Title	Year	Author	Number
METHOD FOR CONTINUOUS CHEMICAL LIQUID CLEANING OF SURFACES OF PRIMARILY SEMICONDUCTOR PLATES	1997	Khakhanina T.I. Kljueva T.B. Selivanova I.N. Savel'Ev V.A. Krasnikov G.Ja. Prosij A.D.	RU2118013C1
METHOD FOR CLEANING METAL SURFACE	1997	Khakhanina T.I. Kljueva T.B. Selivanova I.N. Savel'Ev V.A. Krasnikov G.Ja.	RU2109087C1
CHEMICAL SURFACE CLEANING UNIT FOR PARTS, PRIMARILY SEMICONDUCTOR PLATES	1997	Khakhanina T.I. Kljueva T.B. Selivanova I.N. Savel'Ev V.A. Krasnikov G.Ja. Kovalev A.A.	RU2139594C1
PROCESS OF CLEANSING OF ARTICLES, MAINLY SEMICONDUCTOR PLATES	1992	Khakhanina T.I. Krasavina L.Z. Kljueva T.B. Shmeleva T.B. Krasnikov G.Ja. Karbainov Ju.A.	RU2024993C1
METHOD FOR CLEANING PARTS, PRIMARILY SEMICONDUCTOR WAFERS	2003	Potapova G.F. Klochikhin V.L. Putilov A.V. Gribov B.G.	RU2249882C1
METHOD OF CLEANING SURFACE OF SEMICONDUCTOR PLATES	2011	Rykov Valerij Mikhajlovich Zarezov Maksim Aleksandrovich	RU2495512C2
METHOD OF CLEANING AND OBTAINING POROUS SURFACE OF SEMICONDUCTOR PLATES	2012	Mantuzov Anton Viktorovich Potapova Galina Filippovna Zarezov Maksim Aleksandrovich Panchugin Vjacheslav Aleksandrovich	RU2507630C1
PHOTOELECTRIC CONVERTER MANUFACTURING PROCESS	2003	Samsonenko B.N. Pelipenko B.F.	RU2244986C1
METHOD OF PRODUCING MICRON ELECTRICALLY CONDUCTING TRACKS ON ANODISED ALUMINIUM SUBSTRATES	2019	Dereviashkin Sergei Vladimirovich Soboleva Elena Aleksandrovna Shelkovnikov Vladimir Vladimirovich Orlova Natalia Alekseevna	RU2739750C1
PROCESS OF MANUFACTURE OF CMOS STRUCTURE	1990	Plashchinskij G.I. San'Kov I.V. Nagornyj A.A. Sidorenko E.B.	RU1759185C

RU 2 139 593 C1

Authors

Khakhanina T.I.

Kljueva T.B.

Selivanova I.N.

Savel'Ev V.A.

Krasnikov G.Ja.

Kovalev A.A.

Dates

1999-10-10—Published

1997-01-21—Filed