FIELD: gas supply systems, in particular, for reduction and keeping gas pressure level below atmospheric level. SUBSTANCE: device has housing with input and output chambers, locking regulation valve, which is located between input and output chambers and is connected through lever and pusher to sensitive member, which is designed as loaded spring for diaphragm position setting. Diaphragm center movement direction is perpendicular to valve movement direction. Pusher is connected to diaphragm through non-linear flexible member. In addition, housing has support surface which limits movement of diaphragm by size that is not greater than diaphragm movement upon critical pressure drop by diaphragm. Non-linear flexible member is designed as preliminary contracted spring which interacts with pusher, is mounted in tie and attached to diaphragm or using two contracted springs or permanent magnet or electromagnet, or spring and magnet. EFFECT: increased sensitivity of regulator controlling pressure or usage for diaphragm pressure drops of 1-2 torr, possibility to endure overload caused by vacuum surges up to 1 atm without replacements or additional tuning. 6 cl, 10 dwg
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Authors
Dates
2000-03-10—Published
1997-10-21—Filed