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2 147 292

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IPC

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Application

99103236/12, 1999-02-18

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Start date

1999-02-18

(22)

Actual filing date

1999-02-18

(45)

Published

2000-04-10

(72)

Inventor

Reznichenko M.F.Kuchumov B.M.Kuznetsov F.A.Kuksanov N.K.Muravitskij S.A.Lavrukhin A.V.Korchagin A.I.Borisova L.A.

(73)

Holder

Institut Neorganicheskoj Khimii So RanFup Gorno-Khimicheskij Kombinat

TRICHLOROSILANE PRODUCTION PROCESS Russian patent published in 2000 - IPC

Abstract RU 2147292 C1

FIELD: silicon compounds technology. SUBSTANCE: process involves activation of silicon tetrachloride-hydrogen interaction by high-energy (0.5-2.5 MeV) electron beam in flow-type reactor containing tetrachloride-hydrogen gas-vapor mixture or any worked-out gas-vapor mixtures containing silicon tetrachloride. EFFECT: reduced power consumption. 2 cl, 4 ex

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RU 2 147 292 C1

Authors

Reznichenko M.F.

Kuchumov B.M.

Kuznetsov F.A.

Kuksanov N.K.

Muravitskij S.A.

Lavrukhin A.V.

Korchagin A.I.

Borisova L.A.

Dates

2000-04-10—Published

1999-02-18—Filed