METHOD OF NONCONTACT MEASUREMENT OF TEMPERATURE IN SITU Russian patent published in 2018 - IPC G01K11/00 G01N21/21 G01J4/00 G01J5/00 

FIELD: measuring equipment.

SUBSTANCE: invention relates to a measuring technique, namely to a technique for measuring the physical temperature of an object from the temperature variations of its optical constants, and can be used for remote measurement of the temperature of an object in industry, medicine, biology, in physical studies, etc. Method for contactless measurement of the temperature in situ is claimed, which consists in that the sample is illuminated with polarized light and the intensity change is measured in reflection. During the measurement, electromagnetic radiation reflected from the sample surface with a wavelength in the range of 300–900 nm is recorded. Analyze the intensity change after reflection and find the temperature, solving the following equation: M(T)=F(T), where M(T) is the arithmetic average of the intensity data from all four photodetectors of the ellipsometer, which depends on the temperature, F(T) is a function whose form depends on the material being studied. It is new that for the probing beam a state of linear polarization with rotation 0° and accumulate an array of data for further averaging, and also that the proposed method makes it possible to measure the sample temperature from a temperature of 4 K to its thermal destruction.

EFFECT: increased accuracy of measuring the temperature in situ regardless of the structure of the reflecting surface and at temperatures up to 4 K.

1 cl, 2 dwg