FIELD: measuring instruments, in particular, linear acceleration meters with electrostatic reverse converter. SUBSTANCE: device has housing, first plate, which is made from single-crystal material and comprises stationary member, mobile member and flexible hinge, which connects them. In addition device has second and third plates, two- phase alternating current generator, direct current reference voltage generator, differential capacitance converter with stationary electrodes at second and third plates, amplifier with two outputs of opposite phase. Housing is filled with gas. Each stationary electrode has cover plate, which is made from insulation material and provides working gap between mobile member and cover plate. EFFECT: increased upper band-pass limit. 5 cl, 4 dwg
Title | Year | Author | Number |
---|---|---|---|
COMPENSATING ACCELERATION METER | 1998 |
|
RU2149412C1 |
ACCELEROMETER OF COMPENSATION TYPE | 2000 |
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COMPENSATION ACCELEROMETER | 2001 |
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COMPENSATION ACCELEROMETER | 1998 |
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RU2137141C1 |
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RU2140652C1 |
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|
RU2096813C1 |
Authors
Dates
2000-05-20—Published
1998-04-06—Filed