FIELD: observation, measurement, and modification of surface in multiple-needle complex operation mode. SUBSTANCE: device has object holder, which is connected to scanner and feeding device, sound holder with piezoelectric cell, which is mechanically connected to sound, as well as emission source and emission receiver, which are optically connected to sound. Goal of invention is achieved by introduced three-coordinate drive of sound holder. Sound is designed as set of units, which consist of flexible members. Resonance frequency of each unit differs from others. EFFECT: increased functional capabilities, increased reliability. 4 dwg
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