SCANNING SOUNDING MICROSCOPE INTEGRATED WITH INVERTED OPTICAL MICROSCOPE Russian patent published in 2002 - IPC

FIELD: measurement technology. SUBSTANCE: invention refers to devices measuring relief, linear dimensions and other characteristics of objects, predominantly in biology, with the aid of scanning sounding microscope with simultaneous optical observation of object in light transmitting through it. Scanning sounding microscope integrated with inverted optical microscope has base, piezoscanner, object holder with object mounted for interaction with sonde matched with analysis unit and with optical observation system optically aligned with object and illuminator, unit drawing sonde closer to object interacting with base. Scanning sounding microscope is supplemented with first mirror optically matched with object and anchored on analysis unit placed on unit drawing sonde closer to object for separation, second mirror optically matched with object with the use of first mirror and anchored on unit drawing sonde closer to object. Illuminator comprises light source and condenser optically matched with object. Object holder with object is located on base, sonde is fixed on piezoscanner attached to unit drawing sonde closer to object. Optical observation system is located on opposite side of object relative to sonde. EFFECT: raised resolving power of scanning sounding microscope, widened functional capabilities, improved quality of observation. 3 cl, 3 dwg