WIDE-BAND SCANNING SOUNDING MICROSCOPE Russian patent published in 2003 - IPC

FIELD: nonotechnology, equipment ensuring measurement under mode of uninterrupted scanning under conditions of low temperature. SUBSTANCE: wide-band scanning sounding microscope has object holder with first drive, sonde holder with second drive and third drive moving sonde with reference to object. First drive has first flange with one disc piezobimorph as minimum arranged along one coordinate and anchored on it around edges. Object holder is attached to disc piezobimorph in its central part. Second drive has second flange and frame arranged along two coordinates, at least one U-shaped piezobimorph with four outer electrodes positioned on its stems, with one stem being fixed on second flange and with another stem being anchored on frame, second U- shaped piezobimorph with four outer electrodes positioned on its stems, fixed with one stem on frame and with another stem on sonde holder. Planes of U-shaped piezobimorphs are mutually perpendicular . Third drive moving sonde with reference to object along coordinate perpendicular to plane of object has flat spring joined to first and second flanges, pusher matched to second flange with possibility to move relative to it along coordinate perpendicular to plane of object and mounted for interaction with first flange. EFFECT: possibility to take measurements under conditions of superlow temperatures. 2 cl, 10 dwg