SCANNING PROBE MICROSCOPE WITH CONTROLLED MEASUREMENT MEDIUM Russian patent published in 2010 - IPC G01B7/34 

FIELD: physics.

SUBSTANCE: scanning probe microscope with controlled measurement medium includes a modular pumping unit interfaced with a platform, a sealed cover with at least on optically transparent window having possibility of vacuum-tight installation onto the platform and sealing the measurement module, as well as a viewing unit mounted on the platform with possibility of movement and optically interfaced with the probe at least through one optically transparent window. The platform has a closed vacuum-tight cavity in which there is movable element with a sample holder. The probe holder is fitted with a piezoelectric module and there is an orientation device on the platform which is interfaced with the sealed cover.

EFFECT: broader functionalities of the device.

9 cl, 1 dwg