SCANNING SOUNDING MICROSCOPE WITH LIQUID CELL Russian patent published in 2003 - IPC

FIELD: nanotechnology, specifically, facilities ensuring analysis of surface of specimens with use of liquid cells by method of scanning sounding microscopy. SUBSTANCE: scanning sounding microscope with liquid cell has platform, cantilever holder, cantilever, specimen holder with specimen, magnetic grip, optical unit tracking cantilever, piezoscanner, system of preliminary closing of sonde and specimen, vessel with liquid, control unit. and plate placed on platform. Cantilever holder includes intermediate flange with magnetic and nonmagnetic sections and prism with n surfaces to fix cantilever. Vessel with liquid is open from above and is installed on platform, specimen holder is placed in vessel with liquid, optical unit tracking cantilever is anchored on plate and system of preliminary closing of sonde and specimen is located between piezoscanner and plate. EFFECT: widened functional capabilities and raised resolution of microscope. 3 dwg