PIEZORESONANT GAS HUMIDITY SENSOR Russian patent published in 1999 - IPC

Abstract RU 2141639 C1

FIELD: gas analyzers. SUBSTANCE: novelty is that known sensor incorporating substrate and semiconductor base has its substrate made of AT-cut piezoelectric crystal resonator and semiconductor base, of polycrystalline zinc selenide film deposited onto electrode pad of piezoelectric crystal resonator. EFFECT: improved sensitivity, facilitated manufacture, extended measurement range under static and dynamic conditions. 2 dwg

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RU 2 141 639 C1

Authors

Kirovskaja I.A.

Fedjaeva O.A.

Dates

1999-11-20—Published

1998-05-28—Filed