FIELD: physics.
SUBSTANCE: according to the invention, the gas sensor has a semiconductor base made from a polycrystalline zinc selenide film and a substrate, wherein the substrate is the electrode platform of a crystal resonator.
EFFECT: high sensitivity of the sensor and manufacturability thereof.
3 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| SEMICONDUCTOR GAS ANALYSER | 2011 |
|
RU2464553C1 |
| SEMICONDUCTOR AMMONIA TRACE CONTAMINATION SENSOR | 2015 |
|
RU2589455C1 |
| NANOSEMICONDUCTOR GAS SENSOR | 2013 |
|
RU2530455C1 |
| AMMONIA TRACE CONTAMINANT DETECTOR | 2008 |
|
RU2400737C2 |
| TRACE AMMONIA SENSOR | 2023 |
|
RU2797767C1 |
| AMMONIA TRACE CONTAMINANT SENSOR | 2017 |
|
RU2652646C1 |
| AMMONIA TRACE SENSOR | 2020 |
|
RU2743155C1 |
| AMMONIA SEMICONDUCTOR SENSOR | 2015 |
|
RU2613482C1 |
| SEMICONDUCTOR GAS SENSOR | 2005 |
|
RU2281485C1 |
| SEMICONDUCTOR GAS ANALYSER | 2011 |
|
RU2469300C1 |
Authors
Dates
2012-10-20—Published
2011-04-22—Filed