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2 212 656

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IPC

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Application

2002105792/28, 2002-03-04

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Start date

2002-03-04

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Actual filing date

2002-03-04

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Published

2003-09-20

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Inventor

Kirovskaja I.A.

(73)

Holder

Omskij Gosudarstvennyj Tekhnicheskij Universitet

GAS HUMIDITY SENSOR Russian patent published in 2003 - IPC

Abstract RU 2212656 C1

FIELD: gas analysis, registration and measurement of content of water vapors. SUBSTANCE: semiconductor gas humidity sensor has semiconductor base with metal electrodes deposited on it. Base is made of monocrystalline plate of indium phosphide. EFFECT: raised sensitivity of sensor and its adaptability to manufacture. 2 dwg

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RU 2 212 656 C1

Authors

Kirovskaja I.A.

Dates

2003-09-20—Published

2002-03-04—Filed

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