FIELD: gas analyzing.
SUBSTANCE: gas sensor has semiconducting base provided with metal electrodes on its surface. The base is made of monocrystal plate of gallium arsenide.
EFFECT: enhanced accuracy of measurements.
3 dwg
| Title | Year | Author | Number | 
|---|---|---|---|
| SEMICONDUCTING GAS SENSOR | 2003 | 
 | RU2235316C1 | 
| SEMICONDUCTOR GAS SENSOR OF TRACE OXYGEN MICRO IMPURITIES | 2019 | 
 | RU2710523C1 | 
| SENSOR OF GAS HUMIDITY | 1997 | 
 | RU2125260C1 | 
| SEMICONDUCTOR GAS HUMIDITY SENSOR | 1999 | 
 | RU2161794C2 | 
| SEMICONDUCTOR GAS SENSOR OF TRACE IMPURITIES OF OXYGEN | 2015 | 
 | RU2603337C1 | 
| SEMICONDUCTOR GAS SENSOR | 2005 | 
 | RU2281485C1 | 
| SEMICONDUCTOR GAS SENSOR FOR OXYGEN TRACE SUBSTANCES | 2015 | 
 | RU2610349C1 | 
| SEMICONDUCTOR GAS ANALYSER | 2011 | 
 | RU2464553C1 | 
| SEMICONDUCTOR GAS ANALYSER | 2011 | 
 | RU2469300C1 | 
| GAS SENSOR | 2011 | 
 | RU2464552C1 | 
Authors
Dates
2004-08-27—Published
2002-11-11—Filed