FIELD: measurement technology. SUBSTANCE: sensor of gas humidity has semiconductor base with metal electrodes on its surface. Base is fabricated in the form of monocrystalline plate of zinc selenide doped with zinc. Sensor displays increased sensitivity and is highly adaptable for manufacture. EFFECT: increased sensitivity and high adaptability for manufacture. 2 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| SEMICONDUCTOR GAS HUMIDITY SENSOR | 1999 |
|
RU2161794C2 |
| PIEZORESONANT GAS HUMIDITY SENSOR | 1998 |
|
RU2141639C1 |
| GAS SENSOR | 2002 |
|
RU2235315C2 |
| SEMICONDUCTING GAS SENSOR | 2003 |
|
RU2235316C1 |
| GAS HUMIDITY SENSOR | 2002 |
|
RU2212656C1 |
| SENSOR OF CARBON MONOXIDE | 2002 |
|
RU2206083C1 |
| SEMICONDUCTOR GAS SENSOR | 2005 |
|
RU2281485C1 |
| SENSOR OF CARBON MONOXIDE | 2000 |
|
RU2185615C2 |
| SEMICONDUCTOR GAS ANALYSER | 2011 |
|
RU2464553C1 |
| SEMICONDUCTOR GAS ANALYSER | 2011 |
|
RU2469300C1 |
