METHOD OF PREPARING DIAMOND-LIKE FILMS FROM HYDROCARBON COMPOUNDS Russian patent published in 2001 - IPC

Abstract RU 2171859 C1

FIELD: chemical industry. SUBSTANCE: described is method of preparing diamond-like films from hydrocarbon compounds. In order to improve quality of films, carbon layer is deposited at plasmotrone voltage of 3000-6000 and discharge current intensity of 250-500 mA. EFFECT: improved properties of diamond-like films. 5 cl, 1 dwg

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RU 2 171 859 C1

Authors

Samojlovich M.I.

Samojlovich S.M.

Dates

2001-08-10Published

2000-12-27Filed