FIELD: chemical industry. SUBSTANCE: described is method of preparing diamond-like films from hydrocarbon compounds. In order to improve quality of films, carbon layer is deposited at plasmotrone voltage of 3000-6000 and discharge current intensity of 250-500 mA. EFFECT: improved properties of diamond-like films. 5 cl, 1 dwg
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Authors
Dates
2001-08-10—Published
2000-12-27—Filed