METHOD OF FORMING SUPERCONDUCTIVE NIOBIUM NITRIDE FILM COATING AND CONDUCTOR BASED ON THE LATTER Russian patent published in 2001 - IPC

FIELD: superconductor engineering. SUBSTANCE: metallic niobium is atomized in crossed magnetic and electric fields in inert gas mixture flow to precipitate niobium nitride on ribbon metallic (e.g. copper) support, to which bias potential is imposed, covered by intermediate adhesive layer. Support moves relative to coating zone and niobium nitride film is formed by multiple precipitation on the same areas of ribbon support moving relative to at least one low-pressure plasma stream at specified ratio of residence times for support areas within plasma stream and beyond plasma stream. Coated support is then thermally treated beyond plasma at pressure below 0.01 Pa. EFFECT: expanded technological possibilities. 14 cl, 7 ex