FIELD: mechanical engineering; electronic, electrical and medical industries. SUBSTANCE: proposed plant includes vacuum chamber, at least two magnetron sprayers, gas evacuation, supply and flow rate control system, unit for motion of tape made in form of revolving platform which is closed at the top and is provided with guide rollers, detachable drums, autonomous drives and braking units and shield closing break in tape generatrix; vacuum chamber is provided with at least one port fitted with cover which is hermetically articulated with chamber; located diametrically on cover are magnetron sprayers ; cover is partially rotatable relative to vacuum chamber around axial line which is orthogonal relative to plane of cover and surface of tape; each magnetron sprayer is hermetically articulated with cover; provision is made for adjustable motion of sprayer relative to cover along its own axial line; rollers and drums are extensible. EFFECT: extended functional capabilities due to adaptation of equipment and optimization of coat forming procedure. 3 dwg, 3 ex
Title | Year | Author | Number |
---|---|---|---|
COATING DEPOSITION APPARATUS | 2001 |
|
RU2213159C2 |
PROCESS FORMING FILM COAT AND FACILITY FOR ITS REALIZATION | 2001 |
|
RU2211881C2 |
TECHNOLOGY FORMING FILM COAT AND MAGNETRON FACILITY FOR ITS IMPLEMENTATION | 2001 |
|
RU2210619C2 |
INSTALLATION FOR COATING DEPOSITION | 2002 |
|
RU2214477C2 |
METHOD AND APPARATUS FOR PRODUCING BERYLLIUM OR BERYLLIUM-CONTAINING FOIL | 2000 |
|
RU2194087C2 |
METHOD FOR PRODUCING SUPERCONDUCTING FILM COATING AND CONDUCTOR BUILT AROUND IT | 2000 |
|
RU2199170C2 |
MAGNETRON | 2002 |
|
RU2218450C2 |
METHOD OF FORMING COAT FROM PRECIOUS METALS AND THEIR ALLOYS | 2002 |
|
RU2214476C2 |
METHOD FOR ALLOYING METALS IN FILMS | 2004 |
|
RU2276206C2 |
METHOD OF PRODUCTION OF BERYLLIUM AND BERYLLIUM- CONTAINING FOIL | 2000 |
|
RU2188876C2 |
Authors
Dates
2003-05-10—Published
2001-05-04—Filed