PLANT FOR APPLICATION OF COATS ON WIDE TAPE Russian patent published in 2003 - IPC

Abstract RU 2203979 C2

FIELD: mechanical engineering; electronic, electrical and medical industries. SUBSTANCE: proposed plant includes vacuum chamber, at least two magnetron sprayers, gas evacuation, supply and flow rate control system, unit for motion of tape made in form of revolving platform which is closed at the top and is provided with guide rollers, detachable drums, autonomous drives and braking units and shield closing break in tape generatrix; vacuum chamber is provided with at least one port fitted with cover which is hermetically articulated with chamber; located diametrically on cover are magnetron sprayers ; cover is partially rotatable relative to vacuum chamber around axial line which is orthogonal relative to plane of cover and surface of tape; each magnetron sprayer is hermetically articulated with cover; provision is made for adjustable motion of sprayer relative to cover along its own axial line; rollers and drums are extensible. EFFECT: extended functional capabilities due to adaptation of equipment and optimization of coat forming procedure. 3 dwg, 3 ex

Similar patents RU2203979C2

Title Year Author Number
COATING DEPOSITION APPARATUS 2001
  • Tuleushev Adil Zhianshakhovich
  • Volodin Valerij Nikolaevich
  • Tuleushev Jurij Zhianshakhovich
  • Lisitsyn Vladimir Nikolaevich
  • Kim Svetlana Nikolaevna
  • Asanov Aleksandr Biketovich
RU2213159C2
PROCESS FORMING FILM COAT AND FACILITY FOR ITS REALIZATION 2001
  • Tuleushev Adil Zhianshakhovich
  • Tuleushev Jurij Zhianshakhovich
  • Volodin Valerij Nikolaevich
  • Lisitsyn Vladimir Nikolaevich
  • Kim Svetlana Nikolaevna
  • Asanov Aleksandr Biketovich
RU2211881C2
TECHNOLOGY FORMING FILM COAT AND MAGNETRON FACILITY FOR ITS IMPLEMENTATION 2001
  • Tuleushev Adil Zhianshakhovich
  • Tuleushev Jurij Zhianshakhovich
  • Volodin Valerij Nikolaevich
  • Lisitsyn Vladimir Nikolaevich
  • Kim Svetlana Nikolaevna
RU2210619C2
INSTALLATION FOR COATING DEPOSITION 2002
  • Tuleushev Adil Zhianshakhovich
  • Lisitsyn Vladimir Nikolaevich
  • Tuleushev Jurij Zhianshakhovich
  • Volodin Valerij Nikolaevich
  • Kim Svetlana Nikolaevna
RU2214477C2
METHOD AND APPARATUS FOR PRODUCING BERYLLIUM OR BERYLLIUM-CONTAINING FOIL 2000
  • Tuleushev Adil Zhianshakhovich
  • Volodin Valerij Nikolaevich
  • Lisitsyn Vladimir Nikolaevich
  • Tuleushev Jurij Zhianshakhovich
  • Kim Svetlana Nikolaevna
  • Asanov Aleksandr Biketovich
RU2194087C2
METHOD FOR PRODUCING SUPERCONDUCTING FILM COATING AND CONDUCTOR BUILT AROUND IT 2000
  • Tuleushev Adil Zhianshakhovich
  • Tuleushev Jurij Zhianshakhovich
  • Volodin Valerij Nikolaevich
  • Lisitsyn Vladimir Nikolaevich
  • Kim Svetlana Nikolaevna
  • Asanov Aleksandr Biketovich
RU2199170C2
MAGNETRON 2002
  • Tuleushev Adil Zhianshakhovich
  • Tuleushev Jurij Zhianshakhovich
  • Volodin Valerij Nikolaevich
RU2218450C2
METHOD OF FORMING COAT FROM PRECIOUS METALS AND THEIR ALLOYS 2002
  • Tuleushev Adil Zhianshakhovich
  • Lisitsyn Vladimir Nikolaevich
  • Tuleushev Jurij Zhianshakhovich
  • Volodin Valerij Nikolaevich
  • Kim Svetlana Nikolaevna
RU2214476C2
METHOD FOR ALLOYING METALS IN FILMS 2004
  • Tuleushev Adil Zhianshakhovich
  • Volodin Valerij Nikolaevich
  • Tuleushev Jurij Zhianshakhovich
RU2276206C2
METHOD OF PRODUCTION OF BERYLLIUM AND BERYLLIUM- CONTAINING FOIL 2000
  • Tuleushev Adil Zhianshakhovich
  • Lisitsyn Vladimir Nikolaevich
  • Tuleushev Jurij Zhianshakhovich
  • Kim Svetlana Nikolaevna
  • Volodin Valerij Nikolaevich
  • Asanov Aleksandr Biketovich
RU2188876C2

RU 2 203 979 C2

Authors

Volodin Valerij Nikolaevich

Tuleushev Adil Zhianshakhovich

Tuleushev Jurij Zhianshakhovich

Lisitsyn Vladimir Nikolaevich

Kim Svetlana Nikolaevna

Asanov Aleksandr Biketovich

Dates

2003-05-10Published

2001-05-04Filed