FIELD: application of coatings in vacuum. SUBSTANCE: plasma guide is made in form of parallelepiped, and magnetic system deflecting plasma flux is formed by linear guides located along the parallelepiped edges. Plasma guide has plates with diaphragm filters connected to positive pole of current source. Deflecting magnetic system may be formed by rectangular coils which are installed on the side of adjacent faces of plasma guide. Device allows application of coatings to large areas due to plasma guide configuration which provides for producing plasma flux of rectangular cross-section, practically of any sizes. EFFECT: extended range of coated product sizes and provision of varying configuration of magnet field that makes it possible to increase ion current at plasma guide to 2-3% 6 cl, 5 dwg
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Authors
Dates
1995-06-19—Published
1992-10-29—Filed