FIELD: physics.
SUBSTANCE: invention relates to a source of filtered vacuum arc plasma (versions) and a method of generating filtered plasma. The plasma is filtered using a filter with a plasma-guide bent at a right angle, provided with at least three extra magnetic coils, placed in the region of the bending of the plasma-guide. According to other embodiments, the source has several cathodes and several outlet openings.
EFFECT: magnetic coils and other elements of the filter, including the system of cross ribs and magnetic trap with actute-angle geometry in the plasma-guide channel, provide for the required efficiency of passage of the plasma through the filter, reduced loss of plasma and reduced output of undesirable particles from the plasma filter.
31 cl, 14 dwg, 1 ex
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