ELECTRIC-ARC VACUUM DEVICE Russian patent published in 2007 - IPC C23C14/32 

FIELD: vacuum electric arc devices for applying high-quality coatings, possibly in machine engineering, tool making, electronics, optics and other industry branches for modifying surfaces of materials.

SUBSTANCE: device includes plasma source with focusing electromagnetic winding 3 connected to plasma guide 4 embraced by deflection electromagnetic windings mounted with possibility of rotation around crossing them radius-vector of curvature of plasma duct clockwise and counter clockwise. Deflection electromagnetic winding embracing inlet opening of plasma guide 4 is made with possibility of rotation relative to lane of said opening by 10 - 40°. Diagonal deflection electromagnetic winding 6 is made with possibility of rotation relative to cross section of plasma guide in zone of embracing it by 5 - 30°. Additional deflection electromagnetic windings are mounted at both sides from diagonal deflection electromagnetic winding with possibility of rotation by intermediate angles in such a way that to provide gradual decrease of rotation angle of deflection electromagnetic winding from first one till outlet one. Usage of such device allows improve transmission factor of curvilinear plasma filter and increase ionic current at filter outlet by 1.5 - 1.7 times that is up to 4-5% of electric discharge current. It increases efficiency of coating deposition.

EFFECT: enhanced design of electric arc vacuum device, improved efficiency of coating deposition.

3 cl, 1 dwg, 2 ex