COMBINED SCANNING TUNNEL MICROSCOPE - ELECTRONIC RASTER MICROSCOPE Russian patent published in 1997 - IPC

Abstract RU 2089968 C1

FIELD: topography and analysis of surface composition. SUBSTANCE: microscope has vacuum chamber accommodating scanning tunnel microscope with specimen mounting stage scanning tunnel microscope and electronic raster microscope are connected to control unit affording their joint operation; coarse of scanning microscope head needle is made in the form of parallelepiped fixed by means of electrostatic clamps connected to metal disk pressed through insulating gaskets in metal disks mounted on top end of coarse-displacement tubular piezoelectric drive. EFFECT: improved design. 4 dwg

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RU 2 089 968 C1

Authors

Lipanov A.M.

Shelkovnikov Ju.K.

Osipov N.I.

Tarasov A.V.

Mironov S.V.

Dates

1997-09-10—Published

1994-05-31—Filed