FIELD: piezoelectric engineering; high- frequency crystal resonators. SUBSTANCE: method includes covering crystal element with thin-film electrodes using metal evaporation process, its mounting in holder, heat aging at (100±10)°C, frequency tuning by ion-plasma etching of electrodes while checking up parameters, and encapsulating in package; novelty is that crystal electrodes are manufactured from two aluminum and silver layers formed in single process cycle one after another, with crystal frequency adjusted to rated value by etching upper layer of electrode formed by silver diffusion in aluminum as result of heat aging. EFFECT: improved spectral characteristics.
| Title | Year | Author | Number |
|---|---|---|---|
| METHOD FOR MAKING HIGH FREQUENCY FILTER QUARTZ RESONATOR | 2004 |
|
RU2276453C1 |
| METHOD TO MANUFACTURE PIEZOELEMENTS FOR HIGH-FREQUENCY RESONATORS | 2010 |
|
RU2458458C2 |
| PIEZOELECTRIC CAVITY | 1992 |
|
RU2047267C1 |
| HIGH-FREQUENCY QUARTZ-CRYSTAL RESONATOR | 2004 |
|
RU2264029C1 |
| METHOD FOR MANUFACTURING HIGH-FREQUENCY CRYSTAL RESONATOR OF IMPROVED LINEARITY | 1999 |
|
RU2174736C2 |
| HIGH-FREQUENCY FILTER AT CUT CRYSTAL RESONATOR | 2008 |
|
RU2377718C1 |
| MIDGET HIGH-FREQUENCY FILTERING CRYSTAL RESONATOR OF IMPROVED SINGLE RESPONSE AND LOW SPREAD IN DYNAMIC CHARACTERISTICS | 2002 |
|
RU2232461C2 |
| CRYSTAL RESONATOR MANUFACTURING PROCESS | 1999 |
|
RU2169986C2 |
| PROCESS OF RELIEF FABRICATION IN DIELECTRIC SUBSTRATE | 1992 |
|
RU2054747C1 |
| AT-CUR CRYSTAL ELEMENT MANUFACTURING PROCESS | 1995 |
|
RU2117382C1 |
