OPTICAL MICROINTERFEROMETER Russian patent published in 2003 - IPC

FIELD: optics. SUBSTANCE: optical microinterferometer includes metallographic microscope which illuminator comes in the form of monochromator, beam splitting plate with thickness of 0.5-6.0 mm which splits radiation beam of monochromator into three coherent radiation beams of equal intensity. Beam reflected form surface of plate passes through objective lens of microscope and focuses on surface of specimen, beam reflected from beam-splitting coat passes through phase plate and microscope lens and also focuses on surfaces of specimen and beam passed through beam-splitting coat passes through phase plate, light guide and irradiated specimen from opposite side. One beam passed through specimen and two beams reflected from specimen pass through objective lens and beam-splitting plate and are focused on photodetector of video camera with the use of eye-piece. Technical result of invention lies in measurement of refractive index or thickness of films with thickness between 50 and 1000 nm and precision not less than 5 nm in multilayer film structures. EFFECT: potential for measurement of refractive index of multilayer film structures and their visualization. 1 dwg