METHOD FOR PRODUCING CAPACITIVE MICROMECHANICAL INERTIAL SENSOR Russian patent published in 2003 - IPC

Abstract RU 2207658 C2

FIELD: measurement technology. SUBSTANCE: method intended for producing small-size micromechanical sensors such as accelerometers, gyroscopes, and the like involves introduction of improvements in controlling silicon etching process when shaping rectangular-section jumpers and provides for facilitated assembly of sensor concurrently with its sealing in the course of its assembly and in service. EFFECT: enhanced sensitivity and facilitated assembly and sealing of device. 3 cl, 7 dwg

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RU 2 207 658 C2

Authors

Mokrov E.A.

Zelentsov Ju.A.

Kozin S.A.

Akimov I.G.

Fedulov A.V.

Chistjakova T.G.

Anufriev Ju.S.

Dates

2003-06-27Published

2001-07-09Filed