METHOD TO MANUFACTURE MICROMECHANICAL VIBRATION GYROSCOPE Russian patent published in 2013 - IPC H01L21/302 G01C19/22 

FIELD: measurement equipment.

SUBSTANCE: in the method to manufacture a micromechanical vibration gyroscope a mechanical structure with cross-like torsions is formed from a plate of single-crystal silicon by the method of anisotropic etching. Anisotropic etching of silicon is carried out in two stages. At the first stage they serially form the first and second protective layers with photolithographic ornaments, symmetrical at both sides of the plate, and silicon etching is carried out in the plane {110} to produce the intermediate figure of the torsion in the form of a convex hexagon. And at the second stage the second layer is etched, and the cross-like shape of the torsion is formed by etching of silicon in the planes {110} and {100} to planes {111}.

EFFECT: increased manufacturability of manufacturing of a micromechanical vibration gyroscope, comprising a mechanical structure with cross-like torsions, due to reduced labour intensiveness of the torsion shaping process and increased quality of torsions manufacturing as a result of higher accuracy of reproduction of geometric dimensions of torsions.

2 dwg