CONDUCTING PROBE CARRIER FOR SCANNING PROBE MICROSCOPES Russian patent published in 2003 - IPC

FIELD: nanotechnology; probe carrying devices. SUBSTANCE: probe carrier designed for carrying probes in high- vacuum systems between various process modules using scanning probe microscopes has conducting base with set of holes and unit for fastening probe to pointed edge protruding from probe; mechanical fastening unit of probe has insulating case with bore and conducting insert with bore whose axis is disposed at certain angle to that of insulating case; conducting insert is installed in insulating case bore on one end and probe is mounted in conducting insert bore with its non-pointed end for engaging surface of insulating case bore. EFFECT: enlarged range of charged particles used; reduced probe-to-base heat contact, improved cleaning, enhanced reliability of probe fixation to case. 5 cl, 3 dwg