MULTI-PROBE MODULE FOR SCANNING MICROSCOPE Russian patent published in 2007 - IPC G01B5/28 G12B21/20 

FIELD: probe scanning microscopy, in particular, devices for providing observation, measurement and modification of object surfaces.

SUBSTANCE: multi-probe module for scanning microscope contains a cartridge with probes, engaged with rotation motor, held on the base. Also, a tubular piezo-scanner is additionally introduced, by one end held on base and containing a flange. The cartridge is made in form of a set of overhanging supports with probes, mounted on the flange with possible movements relatively to it and interaction with pusher, engaged with rotation drive. Probes are made in form of quartz resonators with sharp edges. Variants are disclosed, in which overhanging supports are mounted on the flange by means of flat springs, or via joints. The pusher may be made in form of a stop, mounted in the cartridge, with possible interaction with overhanging supports and the flange, while the cartridge is positioned with possible rotation relatively to the flange. The pusher is made in form of first platform with three supports, first ends of which are engaged with the flange, and second ends are positioned with possible interaction with overhanging supports, while shapes of profiles of second ends of supports from the edge to the middle change in accordance with rule y=1/x². The pusher is made in form of second platform with three rollers, positioned with possible interaction with flange and overhanging supports and mounted on second platform with possible rotation. A variant is possible, according to which the pusher is engaged with rotation motor with possible disconnection from it. On the flange a contact element may be held, and quartz resonators may be positioned with possible interaction with it via electric clamps.

EFFECT: increased precision of measurements and reliability of device.

9 cl, 6 dwg