FIELD: nanoelectronics.
SUBSTANCE: small-sized scanning probing microscope has drive and support flange. The latter is conjugated with connecting member provided with measuring head. Measuring head has sample holder with sample, probe holder with probe, mechanism for putting sample holder and piezoelectric scanner and probe holder together. Mechanism for preliminary putting probe and sample together has drive and differential screw. Differential screw is mounted for interaction with drive by means of rotation transmission unit and with probe holder shifting unit. Differential screw is provided with nut. Nut is conjugated with external thread of nut-screw by threat. Nut-screw is mounted for interaction with rotation transmission unit.
EFFECT: improved efficiency of operation.
8 cl, 9 dwg
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