FIELD: scanning probe microscopes.
SUBSTANCE: device has base, flat flexible consoles with control drives and silicon probes. Silicon probe contains a pedestal. Pedestal is made in form of a prism, by one side being fixed to flat flexible console. Opposite side is parallel to console plane. Bases are formed by crystalline planes 111 and perpendicular to plane of flexible console. Other two opposite sides form sharp angles relatively to plane of flexible console. On each one base of prism one probe is formed, made in form of needle-like carbon-containing formation.
EFFECT: broader functional capabilities.
1 cl, 8 dwg
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