FIELD: microscopy.
SUBSTANCE: device has cantilever holder with cantilever, including base with flexible beam, source of excitation of oscillations of flexible beam relatively to standard, block for supporting position of flexible beam, second electrode. On flexible beam first and second electric-conductive areas are formed. Areas are separated by layer of dielectric and are actually a first electrode. First electrode is positioned with possible interaction with second electrode. Cantilever oscillations excitation source is made in form of first electrostatic drive. Electrostatic drive is connected to first electrode.
EFFECT: broader functional capabilities.
1 cl, 6 dwg
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