PROBE BASED ON PIEZO-CERAMIC PIPE FOR SCANNING PROBE MICROSCOPE Russian patent published in 2007 - IPC G12B21/02 

FIELD: nanotechnology, in particular, devices, ensuring receipt of information about topology and other object surface properties.

SUBSTANCE: in accordance to invention, probe based on piezo-ceramic pipe for scanning probe microscope, containing base with sensitive element, on which a needle is mounted, additionally features hollow body, base being made in form of plate with contact areas, sensitive element consists of piezo-ceramic pipe with at least first and second electrodes formed on external surface of piezo-ceramic pipe and with at least one first electrode formed on internal surface of piezo-ceramic pipe and at least second and third electrodes, formed on external surface of piezo-ceramic pipe. Sensitive element is held in overhung position on base with electric contact of one of external electrode and one contact area. Two other contact areas by electric decoupling are connected to two other electrodes of piezo-ceramic pipe. Hollow body is held on base in such a way, that position where piezo-ceramic pipe is fastened and electric decoupling are located outside its hollow. Needle is electrically connected to third electrode.

EFFECT: increased reliability of probe usage and its functional capabilities.

5 cl, 2 dwg