FIELD: chemistry.
SUBSTANCE: sensor has a semiconductor base and a substrate. The semiconductor base is made from a nanosized cadmium telluride film. The electrode platform of a piezoelectric crystal resonator serves as the substrate.
EFFECT: sensor has a simple design, is easy to manufacture, provides high sensitivity when measuring carbon monoxide content.
1 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| NANO-SEMICONDUCTOR GAS SENSOR | 2010 |
|
RU2422811C1 |
| SEMICONDUCTOR SENSOR OF CARBON OXIDE | 2016 |
|
RU2637791C1 |
| CARBON MONOXIDE SENSOR | 2020 |
|
RU2733799C1 |
| SEMICONDUCTOR SENSOR OF CARBON OXIDE | 2019 |
|
RU2739146C1 |
| NANOSEMICONDUCTOR GAS SENSOR | 2013 |
|
RU2530455C1 |
| AMMONIA SEMICONDUCTOR SENSOR | 2015 |
|
RU2613482C1 |
| PIEZO-RESONANCE GAS INDICATOR | 2004 |
|
RU2274854C1 |
| SEMICONDUCTOR GAS SENSOR OF AMMONIA TRACE IMPURITIES | 2015 |
|
RU2607733C1 |
| NITROGEN DIOXIDE INDICATOR | 2004 |
|
RU2274853C1 |
| CARBON MONOXIDE TRANSDUCER | 2006 |
|
RU2326371C1 |
