SEMICONDUCTOR SENSOR OF AMMONIA TRACE SUBSTANCES Russian patent published in 2018 - IPC G01N27/12 

FIELD: measuring equipment.

SUBSTANCE: invention relates to the field of gas analysis, in particular to detecting devices used for recording and changing the ammonia content. The sensor consists of a semiconductor base, executed in the form of a polycrystalline film gallium antimonide (1), and the substrate as which the electrode area (2) of quartz resonator (3) serves.

EFFECT: sensor according to the invention, with a significant simplification of the technology of its manufacture, allows to determine the content of ammonia with a sensitivity several times higher than the sensitivity of known sensors.

3 dwg