NITROGEN DIOXIDE SENSOR Russian patent published in 2017 - IPC G01N27/12 

FIELD: measuring equipment.

SUBSTANCE: invention refers to the area of the gas analysis, in particular to the detecting devices used for registration and measurement of nitrogen dioxide trace components. The invention can be used in ecology. The sensor comprises of a semiconductor substrate (1) made in the form of a polycrystalline film of indium antimonide. A polycrystalline InSb film is deposited on the electrode pad (2) of the piezoquartz resonator (3).

EFFECT: according to the invention the sensor provides, with a significant simplification of the technology of its manufacture, the determination of the content of nitrogen dioxide with a sensitivity several times higher than the sensitivity of the known sensors.

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