FIELD: physics, measurement.
SUBSTANCE: invention is related to the field of gas analysis and is designed for registration and measurement of carbon oxide. Detector comprises semiconducting base and substrate. Semiconducting base is made of polycrystal film of indium phosphide, and substrate is electrode platform of piezoelectric quartz resonator.
EFFECT: increase of detector sensitivity and manufacturability of its production.
3 dwg
| Title | Year | Author | Number |
|---|---|---|---|
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RU2603337C1 |
