FIELD: gas analyzing.
SUBSTANCE: gas gauge has semiconductive base made of monocrystal plate made from indium phosphide. The surface of the plate is provided with metal electrodes. The pressure gauge is used for determining microconcentrations of oxygen.
EFFECT: enhanced sensitivity.
3 dwg
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|---|---|---|---|
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|
RU2235316C1 |
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|
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|
RU2235315C2 |
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|
RU2206083C1 |
