MICROELECTRON HUMIDITY SENSOR OF SURFACE-CONDENSATION TYPE Russian patent published in 2004 - IPC

FIELD: electronics. SUBSTANCE: invention refers to manufacture of integrated circuits controlling content of water vapors in space under IC package both in process of their manufacture and testing and during incoming control. Microelectron humidity sensor of surface-condensation type testing water content in space under IC package includes silicon plate carrying double temperature-sensitive element of resistor-diode type and capacitor comprising two interdigital metallization combs. It comes in the form of strips of sensors connected in parallel and separated by scribing lines. EFFECT: diminished errors in measurement of humidity and temperature, increased output of good sensors from silicon plate. 3 dwg, 1 tbl