MICROWAVE PLASMA-CHEMICAL REACTOR Russian patent published in 2004 - IPC

FIELD: electronic engineering and other industries; microwave reactors with larger amount of plasma. SUBSTANCE: unit for admitting microwave energy into discharge chamber is connected to top end plate of the latter and is made in the form of two coaxial metal tubes, external one being connected to side wall of discharge chamber through adapter unit that has metal body and metal casing; diameter of discharge chamber is much larger than that of external tube; metal body is disposed around internal tube of microwave energy admission unit and is made in the form of truncated cone whose large base is part of top end plate of discharge chamber; metal casing is arranged coaxially to metal body and case-to-body clearance receives insulating ring mounted on top end plate face of discharge chamber; installed into internal bore of body is second insulating ring that receives internal tube of microwave energy admission unit designed for axial displacement; two or four ports are made in external tube wall of microwave energy admission unit to attach rectangular waveguides whose wide walls are parallel to tube axis; coaxial-to- waveguide adapter is joined to top end plate of microwave energy admission unit so that its central conductor is connected through taper to internal tube butt end of microwave energy admission unit; central conductor is insulated from coaxial-to-waveguide adapter shell and external conductor that functions as casing is connected to top end plate of microwave energy admission unit; insulating cylinder is mounted about bore in top end plate between the latter and internal tube of microwave energy admission unit; internal tube accommodates adjusting microwave component made, for instance, in the form of shorted movable piston; workpiece- carrying platform is installed on bottom end plate for displacement relative to the latter; working gas inlet nozzles are disposed in side wall of discharge chamber, at its bottom end plate, tangentially to side wall; additional vortex gas flow generator made in the form of vortex generator nozzles disposed in clearance between internal tube wall and adjusting microwave component is arranged at edge of internal tube of microwave energy admission unit, on its inner wall, conical metal body being joined to adjusting microwave component so that its vertex is outward-directed along tube axis and emerges from internal tube through distance equal to one or two radii of internal tube; working gas inlet nozzles disposed in side wall of discharge chamber may be placed in cavity formed by bottom end plate of discharge chamber and metal or insulating cylinder coaxial to discharge chamber that forms clearance between its outer surface and discharge chamber wall, its size being equal to one through five diameters of nozzle outlet hole; hollow of this cavity is disposed close to lower working position plane of workpiece- carrying platform. EFFECT: enhanced microwave power injected in discharge, working pressure in discharge chamber; enlarged workpiece diameter; enhanced reliability and output capacity of reactor. 2 cl, 5 dwg