MICROWAVE PLASMATRON AND PLASMA GENERATION METHOD Russian patent published in 2024 - IPC H05H1/50 

FIELD: plasma generation.

SUBSTANCE: invention relates to means of generating microwave discharge plasma. Microwave energy is fed into the metal discharge chamber through a longitudinal slot along the chamber axis from a metal waveguide pipe attached to this slot and located along the axis of the discharge chamber. Gas flow rotating around the axis of the discharge chamber and swirled inside the waveguide tube is introduced through the same slot. To prevent formation of gas recirculation zone in axial zone inside waveguide pipe there is additional metal pipe of smaller diameter. Between the pipe of smaller diameter and the outer waveguide pipe, a rotating gas flow is introduced, then through the coaxial waveguide formed in this way, microwave energy is introduced on an electromagnetic wave of the NI type, which is excited in the coaxial waveguide, through a window in the outer pipe of the coaxial waveguide in the zone remote from the input slot, into the discharge chamber. Method ensures removal of the sealing dielectric window for input of microwave energy into the zone inaccessible for reaction products from the active zone of microwave discharge and thermal effect of plasma on the window, as well as alignment of the slot for input of microwave energy into the discharge chamber with input of plasma-forming or initial working gas.

EFFECT: high reliability and durability of the device with the possibility of carrying out plasma-chemical and thermal (spheroidization) processes of high efficiency at microwave power introduced into the microwave discharge of 30 kW and more at atmospheric pressure of the plasma-forming gas.

2 cl, 1 dwg