PIEZOSCANNER PROVIDING FOR THREE-COORDINATE PLANE-PARALLEL MOVEMENT IN OBJECT PLANE Russian patent published in 2004 - IPC

FIELD: nanotechnology; displacement of probes or specimens in probing microscopy. SUBSTANCE: piezoscanner that provides for movement in three coordinates (X, Y, Θ) in object plane and in one coordinate perpendicular to object plane has base mounting first piezotube secured thereon at one end and provided with electrodes on inner and outer surfaces; first junction member mounted on other end of first piezotube incorporates second piezotube secured on this member at one end and provided with four separated electrodes X₂₁, X₂₂, Y₂₁, Y₂₂ on outer surface and four separated electrodes, on inner surface which are disposed against outer electrodes X₂₁, X₂₂, Y₂₁, Y₂₂.; second junction member mounted on other end of second piezotube and provided with third piezotube secured thereon at one end, this piezotube having four separated electrodes X₃₁, X₃₂, Y₃₁, Y₃₂ on outer surface and four separated electrodes , on inner surface which are disposed against respective outer electrodes X₃₁, X₃₂, Y₃₁, Y₃₂; secured on other end of third piezotube is object holder. Symmetry axes of second-piezotube electrodes are aligned with those of respective third-piezotube electrodes . Electrodes of second and third piezotubes are so connected that their bend is ensured in phase opposition. First piezotube has outer and inner electrodes Z and Z . EFFECT: enlarged functional capabilities. 8 cl, 11 dwg